Axial Structure of High-Vacuum Planar Magnetron Discharge Space

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概要

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• The spatial structure of high-vacuum planar magnetron discharge is theoretically investigated taking into account the electron confinement. The boundary x_<es> of the electron confinement region depends on B_A with E_a/B_A as the parameter (B_A: the magnetic flux density at the anode, E_a: the average electric field strength). The location at which the frequency of ionization events takes the maximum is expressed as C_<nN>X_<iep> (C_<nN> a factor related to the electron density distribution, x<iep>: the distance of the location from the cathode at which is most efficient). With increasing E_a and B_A at a fixed E_a/B_A, the density of the confined energetic electrons increases. With increasing E_a, the region where ionization is efficient shifts to the cathode side to give a high efficiency of the magnet. The boundary x_<es> as determined by the probe method agreed with the theoretical prediction.

• 社団法人応用物理学会の論文
• 1999-09-15

著者

• Miura Tsutomu

  Department Of Applied Bioscience Tokyo University Of Agriculture

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