A Hot Cathode Magnetron Gauge using a Divergence-Type Magnetic Field for Electric Field Control
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概要
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A new sensitive type of magnetron gauge has been developed in order to obtain a linear response of ion current, $I_{\text{i}}$, to pressure, $P$, with a high sensitivity over a wide range. The gauge is equipped with two ion collectors. The ratio of the ion currents of the two ion collectors is measured and kept constant by controlling the filament voltage, in order to keep the electric field constant within the anode over a wide range of pressure measurement. When a divergent-magnetic field is applied to this hot-cathode magnetron gauge, the slope of the plot of the filament voltage vs the ratio of the ion current of the two separate two ion collectors is improved from $-0.28$ to $+1.1--+3.9$ (V-1). When the diameters of the ion collectors were investigated, it was found that the current ratio $\eta=1$ was attained when the outer diameters of the ion collectors were identical, and their inner diameters were 2 and 8 mm respectively. With this configuration, ion current was directly proportional to pressure in the range of $1\times 10^{-8}--1\times 10^{-4}$ Pa.
- 2004-07-15
著者
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Asamaki Tatsuo
Department Of Electrical Engineering Science University Of Tokyo
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Masui Noriaki
Department Of Electrical Engineering Faculty Of Science And Technology Science University Of Tokyo
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Nishikawa Eiichi
Department Of Electrical Engineering Science University Of Tokyo
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Miura Tsutomu
Department Of Applied Bioscience Tokyo University Of Agriculture
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Masui Noriaki
Department of Electrical Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8601, Japan
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Iwabuchi Takenori
Department of Electrical Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8601, Japan
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Asamaki Tatsuo
Department of Electrical Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8601, Japan
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