Direct Measurement of Potential Distribution in Planar Magnetron Discharge by Probe Method
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概要
- 論文の詳細を見る
In order to understand the discharge mechanism of crossed electrical and magnetic field discharge, a fine probe is inserted into the planar magnetron discharge, and the potential distribution and its characteristics are measured. In the positive space charge region (PSC), a sharp cathode fall is observed. On the other hand, it is found in the negative space charge region (NSC) that the space potential <I>Ps</I> is given by <I>Ps</I>= <I>Vd</I> (<I>x</I>/<I>Dst</I> )<I><SUP>n</SUP></I>, where <I>Vd</I>, <I>x</I>, <I>Dst</I> and <I>n</I> are the discharge voltage, the distance from the cathode surface, the distance between the anode and the cathode, and the slope, respectively. The slope <I>n</I> is about 1.7 in the pressure range of 10<SUP>-3</SUP>10<SUP>-2 </SUP>Pa. In addition, the slope <I>n</I> is little affected by the pressure <I>P</I>, <I>Vd</I> and <I>Dst</I>, and is kept in the range of 1.61.8.
- 日本真空協会の論文
- 1995-10-20
著者
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ASAMAKI Tatsuo
Department of Electrical Engineering, Science University of Tokyo
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MIURA Tsutomu
Department of Electrical Engineering, Science University of Tokyo
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Asamaki Tatsuo
Department Of Electrical Engineering Science University Of Tokyo
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Miura Tsutomu
Department Of Electrical Engineeing Faculty Of Engineering Science University Of Tokyo
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Henmi Takahiro
Department Of Electrical Engineering Science University Of Tokyo
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KANEKO Chiori
Department of Electrical Engineering, Science University of Tokyo
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Miura Tsutomu
Department Of Electrical Engineering Science University Of Tokyo
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Miura Tsutomu
Department Of Applied Bioscience Tokyo University Of Agriculture
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Kaneko Chiori
Department Of Electrical Engineering Science University Of Tokyo
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