Theory on High-Vacuum Planar Magnetron Discharge
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概要
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A theory on high-vacuum planar magnetron discharge for the wide range of E_a/B_A > 2.0×10^6/nV/(m・T) has been developed (E_a: magnitude of the average electric field strength; B_A: magnetic flux density at the anode; n; power index of the potential distribution). The relevant parameters on the ionizing collisions and the geometrical factors from the cross section of erosion are incorporated in the theory. The discharge current I becomes a function of E_a/B_A with the parameter of B_A. With E_a/B_A fixed, I ∝ B_A is shown. The optimum E_a/B_A ratio gives the local maximum of I. This ratio depends on n and the power index of magnetic flux density distribution N. In the range of E_a/B_A≧2.3×10^7/nV/(m・T), function I becomes the simple form I ∝ E^M_aB^<1-M>_A, where M=N/(n-1+N). Experimental work has also been carried out.
- 社団法人応用物理学会の論文
- 1997-02-15
著者
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Miura Tsutomu
Department Of Electrical Engineering Faculty Of Engineering Science University Of Tokyo
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Miura Tsutomu
Department Of Applied Bioscience Tokyo University Of Agriculture
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ASAKAKI Tatsuo
Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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Asakaki Tatsuo
Department Of Electrical Engineering Faculty Of Engineering Science University Of Tokyo
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Asakaki Tastuo
Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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