Theory on High-Vacuum Planar Magnetron Discharge Incorporating the Effect of Escaping Electrons

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概要

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• A theory, which includes the case where B_A(magnetic flux density at the anode)is insufficient to confine the energetic electrons in the discharge space, has been developed.At a fixed E_a/B_A(E_a≡V_A/d_0, V_A:anode voltage and d_0:distance between the electrodes), I α B^β_A(I:discharge current and β:const.≩1).With increasing B_A, so that most of the energetic electrons are confined, β becomes 1.For d_0=42mm, in E_a/B_A≩2.3×10^7/nV/(m・T)whenB_A>5mT and E_a>1.2×10^5/nV/m when B_A<5mT(n:power index of the potential distribution), I becomes I α E^M_aB^<1-M>_A(M:const.<1>.The minimal conditions necessary to sustain the magnetron discharge are E_a/B_A)2.0×10^6/nV/(m・T)when B_A>10mT and E_a>2.0×10^4/nV/m when B_A<10mTfor d_0=42mm and E_a<(G_0/n)B^2_A(G_0:const.).With decreasing d_0, the above conditions are modified by a corresponding increment in B_A.Experimental works have been carried out.

• 社団法人応用物理学会の論文
• 2000-08-15

著者

• Miura Tsutomu

  Department Of Electrical Engineeing Faculty Of Engineering Science University Of Tokyo

• Miura Tsutomu

  Department Of Applied Bioscience Tokyo University Of Agriculture

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