Copper Filling of Deep Submicrometer Trenches with Ruthenium-Lined Barrier Metal by High-Vacuum Magnetron Sputtering Using Argon Gas with Added Oxygen
スポンサーリンク
概要
- 論文の詳細を見る
A fine structure with a ruthenium-lined barrier layer was experimentally fabricated, and copper-filling tests were performed by high-vacuum sputtering using argon gas with added oxygen. As a result, the complete copper filling of all trenches with a width of about 80 nm and an aspect ratio (AR) of four was accomplished with good reproducibility. The experimental results also show that complete copper filling was even possible in the case of trenches with a width of about 30 nm and an AR of nine. The reasons for these results are explained by applying capillary theory from the viewpoint of copper wettability on a ruthenium-lined layer.
- 2012-02-25
著者
-
Saito Shigeru
Department Of Anesthesiology And Reanimatology Gunma University School Of Medicine
-
Itoh Masatoshi
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, Shinjuku, Tokyo 162-8601, Japan
関連論文
- PJ-726 A Multicenter Registry of a Novel Filter Device for Distal Protection ; Filtrap ^Registry(Coronary revascularization, PCI-17, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- Characterization of Ventricular Myocardial Performance in the Fetus by Tissue Doppler Imaging
- PE-064 The relation between the coronary artery plaque and metabolic syndrome using 64-slice multislice CT coronary angiography and abdominal CT(CT/DSA(04)(I),Poster Session(English),The 72nd Annual Scientific Meeting of the Japanese Circulation Society)
- PE-181 The Outcome of Patients Who Stopped the Antiplatelet Therapy for the Operations after Stent Implantations(Thromboembolism/Antithrombotic therapy/Thrombolysis-3, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- FRS-098 SPIRIT III Japan vs. SPIRIT III US : Eight-Month IVUS Analysis of Everolimus-Eluting Stent(FRS20,Clinical Evidence of DES Era (2) (IHD),Featured Research Session (English),The 73rd Annual Scientific Meeting of The Japanese Circulation Society)
- Evaluation of cerebrovascular carbon dioxide reactivity in patients with diabetes mellitus under sedative doses of propofol
- Total body propofol clearance (TBPC) after living-donor liver transplantation (LDLT) surgery is decreased in patients with a long warm ischemic time
- Plasma concentration for optimal sedation and total body clearance of propofol in patients after esophagectomy
- Successful management of a patient with neuroleptic malignant syndrome associated with marked elevation of serum creatine kinase
- In patients with adult respiratory distress syndrome, initial responders to inhaled nitric oxide did not show better outcome than nonresponders
- Alteration of regional brain oxygen saturation (rSO_2) in a patient with cerebral damage after aortic arch replacement : carbon dioxide reactivity monitored by near-infrared spectroscopy suggested inverse steal phenomenon
- Smoking During Pregnancy Increases Risks of Various Obstetric Complications: A Case-Cohort Study of the Japan Perinatal Registry Network Database
- Subsequent pregnancy outcomes in recurrent miscarriage patients with a paternal or maternal carrier of a structural chromosome rearrangement
- PE-084 Late Angiographic Stent Thrombosis (LAST) after Cypher Stents Imaplantation(Coronary revascularization, PCI-8 (IHD) PE14,Poster Session (English),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- Characterization and Primary Structure of a Base Non-Specific and Acid Ribonuclease from Dictyostelium discoideum
- 5 A Multicenter Registry of a Novel Filter Device for Distal Protection : Filtrap^ registry(New Horizon in Coronary Interventions for Acute Coronary Syndrome, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- Effects of maternal dioxin exposure on newborn size at birth among Japanese mother-infant pairs
- Complete hydatidiform mole in a triplet pregnancy coexisting two viable fetuses : Case report and review of the literature
- Low adjusted serum ionized calcium concentration shortly after birth predicts poor outcome in neonatal hypoxic-ischemic encephalopathy
- Growth Cone Collapse and Neurite Retractions : An Approach to Examine X-irradiation Affects on Neuron Cells
- A novel bFGF-GH injection therapy for two patients with severe ischemic limb pain
- The Transradial Directional Coronary Atherectomy
- The efficacy of transradial coronary artery stenting in the elderly patients (≥80 years) compared to non-elderly patients (
- Mirimostim (macrophage colony-stimulating factor ; M-CSF) improves chemotherapy-induced impaired natural killer cell activity, Th1/Th2 balance, and granulocyte function
- Anatomic analysis of computed tomography images obtained during fluoroscopic computed tomography-guided percutaneous lumbar sympathectomy
- Acute thrombus formation in the left atrium after the termination of warfarin
- Jugular Venous Oxygen Saturation During Mild Hypothermic Versus Normothermic Cardiopulmonary Bypass in Elderly Patients
- Oral etodolac, a COX-2 inhibitor, reduces postoperative pain immediately after fast-track cardiac surgery
- Hemodynamic changes during electroconvulsive therapy under propofol anesthesia
- Short- and Long-Term Outcome of No Re-Flow Phenomenon with IABP Support(Coronary Revascularization, PTCA/Stent/DCA/Rotablator/New Device 2 (IHD), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- -217- THE INFLUENCES OF ANGIOGRAPHIC MORPHOLOGY ON SUCCESS RATE, COMPLICATION RATE AND RESTENOSIS RATE OF CORONARY ANGIOPLASTY : PTCA, CABG : FREE COMMUNICATIONS(II) : PROCEEDINGS OF THE 51th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
- -3- EFFECTIVENESS OF PERCUTANEOUS TRANS-LUMINAL CORONARY ANGIOPLASTY IN PATIENTS WITH ACUTE MYOCARDIAL INFARCTION : PTCA : FREE COMMUNICATIONS(I) : PROCEEDINGS OF THE 51th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
- -292-MORPHOLOGICAL FINDINGS OF THE CORONARY ARTERIES AFTER PTCA : A MECHANISM INVOLVED IN THE PATHOGENESIS OF RESTENOSIS
- Coronary Artery Fistula into a Persistent Left Superior Vena Cava:Report of a Case
- Placental ecto-ATP diphosphohydrolase: its structural feature distinct from CD39, localization and inhibition on shear-induced platelet aggregation
- The comparative effects of sevoflurane versus isoflurane on cerebrovascular carbon dioxide reactivity in patients with previous stroke
- Alterations in the myocardial β-adrenergic system during experimental endotoxemia
- Differential effects of hyperventilation on cerebral blood flow velocity after tourniquet deflation during sevoflurane, isoflurane, or propofol anesthesia
- Comparison of the effects of vasopressin and norepinephrine on organ perfusion during septic shock in streptozotocin-induced diabetic rats
- HER2 Is Frequently Over-expressed in Ovarian Clear Cell Adenocarcinoma : Possible Novel Treatment Modality Using Recombinant Monoclonal Antibody against HER2, Trastuzumab
- Macrophage Colony-stimulating Factor (M-CSF) Prevents Infectious Death Induced by Chemotherapy in Mice, While Granulocyte-CSF Does Not
- Advanced malignant solitary fibrous tumor in pelvis responding to radiation therapy
- PE-071 Transradial Coronary Intervention for Chronic Total Occlusion Using 6 French Guiding Catheters(Angina Pectoris, Clinical 1 (IHD) : PE13)(Poster Session (English))
- PE-070 Transradial Coronary Intervention for Chronic Total Occlusion(Angina Pectoris, Clinical 1 (IHD) : PE13)(Poster Session (English))
- Dumbbell-shaped osteochondroma of the fifth rib causing spinal cord compression
- Exaggerated placental site reaction following an elective abortion
- Effects of landiolol on left ventricular function during electroconvulsive therapy : a transthoracic echocardiographic study
- Computed tomography fluoroscopy-guided lumbar sympathectomy for a patient with peripheral vascular disease and lumbar spine compression fracture
- SYNERGISTIC EFFECT OF HEPATOCYTE GROWTH FACTOR AND FIBROBLAST GROWTH FACTOR-1 ON THE BRANCHING MORPHOGENESIS OF RAT SUBMANDIBULAR GLAND EPITHELIAL CELLS
- Interleukin-8 and glucose in amniotic fluid, fetal fibronectin in vaginal secretions and preterm labor index based on clinical variables are optimal predictive markers for preterm delivery in patients with intact membranes
- The combination of a fiberoptic stylet and a McCoy laryngoscope facilitates tracheal intubation in difficult airway cases
- Hepatocyte Growth Factor Promotes the Growth of Cytotrophoblasts by the Paracrine Mechanism
- High Mobility Group Box 1 Levels in On and Off-Pump Cardiac Surgery Patients
- Initial characterization and bone resorbing factors in primary cultured cells derived from human oral tissues
- Treatment for patients with postmenopausal osteoporosis who have been placed on HRT and show a decrease in bone mineral density : effects of concomitant administration of vitamin K_2
- Macrophage Colony-stimulating Factor Prevents Febrile Neutropenia Induced by Chemotherapy
- Detection of Apoptosis and Expression of Apoptosis-associated Proteins as Early Predictors of Prognosis after Irradiation Therapy in Stage IIIb Uterine Cervical Cancer
- Preservation of the vulva in stage III squamous cell carcinoma with intra-arterial chemotherapy
- OSTEOBLASTIC CHARACTER OF FIBROBLASTS DERIVED FROM HUMAN PERIODONTAL LIGAMENT
- Paclitaxel/carboplatin versus cyclophosphamide/adriamycin/cisplatin as postoperative adjuvant chemotherapy for advanced endometrial adenocarcinoma
- Carbon dioxide exhalation temporarily increases during electroconvulsive therapy
- 523 Detection of HTLV-I genome in infants born to HTLV-I seropositive mother by polymerase chain reaction.
- Time course of changes in cerebral blood flow velocity after tourniquet deflation in patients with diabetes mellitus or previous stroke under sevoflurane anesthesia
- EFFECT OF KANJI AND KANA READING ON CEREBRAL BLOOD FLOW PATTERNS MEASURED BY PET
- Work Function and Dipole Barrier of Sputter-Cleaned Fe-Ni Alloy Surfaces
- Thermogangliolysis of the Gasserian ganglion under computed tomography fluoroscopy
- Percutaneous radiofrequency lumbar facet rhizotomy guided by computed tomography fluoroscopy
- Preoperative depression is a risk factor for postoperative short-term and long-term cognitive dysfunction in patients with diabetes mellitus
- Dose-dependent effects of repeated ketamine administration on muscarinic acetylcholine receptors in the mouse forebrain
- Effects of landiolol, a short-acting beta-1 blocker, on hemodynamic variables during emergence from anesthesia and tracheal extubation in elderly patients with and without hypertension
- Adequacy of control of preoperative hypertension can affect landiolol-induced hemodynamic changes in elderly patients during emergence from anesthesia
- Effects of two methods of fentanyl bolus administration during remifentanil-based anesthesia on pain in the immediate postoperative period
- Use of rocuronium-sugammadex, an alternative to succinylcholine, as a muscle relaxant during electroconvulsive therapy
- Transradial and slender percutaneous coronary intervention : less invasive strategy in PCI
- Possible indications of beta-blockers in the perioperative period other than prevention of cardiac ischemia
- Cytokine Profile of Decidual T cells and NK cells(Recent Development in Reproductive Medicine)
- Comparison of recovery times from rocuronium-induced muscle relaxation after reversal with three different doses of sugammadex and succinylcholine during electroconvulsive therapy
- Basic vascular research conducted by Japanese anesthesiologists : Opening remarks
- Significance of Delayed Gadolinium Enhancement Cardiac Magnetic Resonance in Patients with Brugada Syndrome
- Copper Filling of Deep Submicrometer Trenches with Ruthenium-Lined Barrier Metal by High-Vacuum Magnetron Sputtering Using Argon Gas with Added Oxygen
- Influence of Hemodynamic Variations on the Pharmacokinetics of Landiolol in Patients Undergoing Cardiovascular Surgery
- Necrotizing fasciitis following psoas muscle abscess caused by hypermucoviscous Klebsiella pneumoniae
- Anesthesia management for electroconvulsive therapy : hemodynamic and respiratory management
- Evaluation of Domain Boundary of Piezo/Ferroelectric Material by Ultrasonic Atomic Force Microscopy
- Intrapartum management guidelines based on fetal heart rate pattern classification
- Endometrioid adenocarcinoma of the vagina with a microglandular pattern arising from endometriosis after hysterectomy
- Copper Filling of Deep Sub-μm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas
- Global Cardiovascular Device Innovation: Japan-USA Synergies:– Harmonization by Doing (HBD) Program, a Consortium of Regulatory Agencies, Medical Device Industry, and Academic Institutions –
- Association between cerebrovascular carbon dioxide reactivity and postoperative short-term and long-term cognitive dysfunction in patients with diabetes mellitus
- Outstanding circulation research by Japanese scientists
- Effect of flurbiprofen, metoclopramide and droperidol for nausea and emesis during cesarean section under spinal anesthesia