Novel Method for In Situ Monitoring of Thickness of Quartz during Wet Etching

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概要

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• In this work, we present a novel method based on a plate wave sensor for the in situ monitoring of the thickness of quartz membranes during wet etching. Similarly to oscillators and resonators, some acoustic devices require the thickness of quartz membranes to be determined precisely. Precise control of the thickness of quartz membranes during wet etching is important, because the thickness strongly influences post processing and frequency control. Furthermore, the proposed plate wave sensor, allows the thickness of quartz membranes from a few μm to hundreds of μm to be monitored in situ, which depends on the periodicity of an interdigital transducer (IDT). In summary, the proposed method for measuring the thickness of quartz membranes in real time has a high accuracy, is simple to set up and can be mass-produced. Also described herein are the principles of the method used, the detailed process flow, the measurement set up and the simulation and experimental results. The theoretical and measured values differ by an error of less than 1 μm, implying a close correspondence.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-10-15

著者

• LEE Chi-Yuan

  Department of Mechanical Engineering, National Taiwan University

• CHEN Yung-Yu

  Institute of Applied Mechanics, National Taiwan University

• Chang Pei-zen

  Institute Of Applied Mechanics National Taiwan University

• Dai Ching-liang

  Department Of Mechanical Engineering Oriental Institute Of Technology

• Chen Ping-hei

  Department Of Mechanical Engineering National Taiwan University

• Lee Chi-Yuan

  Department of Mechanical Engineering, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Lee Shuo-Jen

  Department of Mechanical Engineering, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Lee Chi-Yuan

  Department of Mechanical Engineering, Fuel Cell Research Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Chen Ping-Hei

  Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.

• Dai Ching-Liang

  Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan, R.O.C.

• Chang Pei-Zen

  Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, R.O.C.

• Chen Yung-Yu

  Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, R.O.C.

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