System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University

スポンサーリンク

概要

論文の詳細を見る
2003-06-01

著者

関連論文

In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
Opto-Mechatronic Configurations to Maximize Dynamic Range and Optimize Resolution of Optical Instruments
System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University(Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Invited paper System Perspective of Electromechanical Devices Development (国際セッションIS-EMD2002〔英文〕)
A High Performance Doppler Interferometer for Advanced Optical Storage Systems
System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
Microstructural Fabrication for Measuring Residual Strains of CMOS Thin Films
Sensor and Actuator Interaction for Nanometer Positioning Microactuators (国際セッションIS-EMD2002〔英文〕)
Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems
In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
Novel Method for In Situ Monitoring of Thickness of Quartz during Wet Etching
Thermo-Piezoelectric Finite Element Modeling for Piezoelectric Transformers

もっと見る

スポンサーリンク