Sensor and Actuator Interaction for Nanometer Positioning Microactuators (国際セッションIS-EMD2002〔英文〕)

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概要

• 論文の詳細を見る

• The sensing mechanism of actuators is discussed in this paper. Some actuators like thermal and SMA wires actuators have a self-sensing mechanism which can be used to precisely control the displacement of actuators. The self-sensing mechanism of thermal wire actuators are detailed, analyzed and verified in this paper. Actuators cannot have a self-sensing mechanism like piezoelectric actuators since an external sensor is required in the control loop. A homodyne quadrature interferometer configuration with analog output capabilities was developed and verified on a closed-loop control of a stacked piezoelectric actuator to achieve a traceable nanometer scale precision actuating system.

• 社団法人電子情報通信学会の論文
• 2002-11-07

著者

• Wu Wen-jong

  Institute Of Applied Mechanics National Taiwan University

• Lee Chih-kung

  Faculty Institute Of Applied Mechanics National Taiwan University

• Lin Chun-Hui

  Institute of Applied Mechanics, National Taiwan University

• Chen Zeng-De

  Institute of Applied Mechanics, National Taiwan University

• Lin Chun-hui

  Institute Of Applied Mechanics National Taiwan University

• Chen Zeng-de

  Institute Of Applied Mechanics National Taiwan University

関連論文

• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University(Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
• Invited paper System Perspective of Electromechanical Devices Development (国際セッションIS-EMD2002〔英文〕)
• A High Performance Doppler Interferometer for Advanced Optical Storage Systems
• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
• Sensor and Actuator Interaction for Nanometer Positioning Microactuators (国際セッションIS-EMD2002〔英文〕)
• Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems

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