A High Performance Doppler Interferometer for Advanced Optical Storage Systems

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概要

• 論文の詳細を見る

• The design thinking, implementation, and testing results of a newly developed Doppler interferometer is described. The three built-in measuring modes including (1) single-beam mode for measuring absolute vibration, (2) dual-beam for measuring differential vibration, and (3) distance measuring, are all presented. To facilitate the application of this interferometer for advanced optical storage applications, a circular polarization interferometer configuration was adopted to arrive at a compact size and to enable the adoption of a built-in microscopic imaging system that can be used both as an alignment aid and as a sample imaging system. The configuration of the inherent dynamic system analysis capabilities that can be used to investigate the Bode plot of optical storage systems is also examined in detail. The nanometer resolution and megahertz bandwidth capabilities of this interferometer were verified in various advanced optical storage systems related experiments.

• 社団法人応用物理学会の論文
• 1999-03-30

著者

• Wu G‐y

  Ahead Optoelectronics Inc.

• Lin Yen-chen

  Institute Of Microelectronics & Department Of Electrical Engineering National Cheng Kung Univers

• Wu Wen-jong

  Institute Of Applied Mechanics National Taiwan University

• Lee Chih-kung

  Institute Of Applied Mechanics National Taiwan University

• Wang Jen-shung

  Institute Of Applied Mechanics National Taiwan University

• Wu Giin-yuan

  Ahead Optoelectronics Inc.

• Teng Chao-ting

  Ahead Optoelectronics Inc.

• LIN Chi-Ting

  Institute of Applied Mechanics, National Taiwan University

• HSIAO Wen-Hsing

  Institute of Applied Mechanics, National Taiwan University

• SHIH Hsieh-Chin

  Institute of Applied Mechanics, National Taiwan University

• LIN San-Chien

  AHEAD Optoelectronics, Inc.

• LIN Chan

  AHEAD Optoelectronics, Inc.

• LEE Ching-Fa

  AHEAD Optoelectronics, Inc.

• LIN Yen-Chen

  AHEAD Optoelectronics, Inc.

• Lin Chi-ting

  Institute Of Applied Mechanics National Taiwan University

• Lin San-chien

  Ahead Optoelectronics Inc.

• Hsiao Wen-hsing

  Institute Of Applied Mechanics National Taiwan University

• Shih Hsieh-chin

  Institute Of Applied Mechanics National Taiwan University

関連論文

• Opto-Mechatronic Configurations to Maximize Dynamic Range and Optimize Resolution of Optical Instruments
• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University(Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
• Invited paper System Perspective of Electromechanical Devices Development (国際セッションIS-EMD2002〔英文〕)
• A High Performance Doppler Interferometer for Advanced Optical Storage Systems
• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
• 特集解説 Interferometric Metrology of Dynamic Properties of MEMS (特集 マイクロマシンにおける計測技術)
• Sensor and Actuator Interaction for Nanometer Positioning Microactuators (国際セッションIS-EMD2002〔英文〕)
• Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems
• Thermo-Piezoelectric Finite Element Modeling for Piezoelectric Transformers

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