Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems

概要

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Interferometers based on laser Doppler effect are used as the vehicle to examine the cross relationship and performance impact among sub-systems such as optical layout, mechanical layout, signal processing algorithm, and signal processing circuitry. The classification of interferometers into the three main categories (e.g. homodyne, heterodyne and quadrature) and their influence on signal processing algorithms and circuitry which impact interferometer performance is examined. A quadrature configuration, found to have some unique advantages, is detailed. Also presented is an experimental laser encoder set-up equipped with a real-time signal processing circuitry based on a high performance field programmable gate array (FPGA) circuitry with a PC interface for quadrature signal decoding that was constructed to verify the quadrature configuration presented. The experimental data obtained that verifies how this new system architecture can fulfill the stringent demands of today's high performance, high accuracy metrology systems is also examined.
社団法人応用物理学会の論文
1999-03-30