Invited paper System Perspective of Electromechanical Devices Development (国際セッションIS-EMD2002〔英文〕)

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概要

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• Some electromechanical devices and systems produced using MEMS fabrication processes are detailed. Two precision measurement metrologies for inspecting electromechanical products are also described. As the trend of electromechanical device development is towards pursuing smaller and smaller sizes with robust mechanisms and powerful functions, micro-electric-mechanical system (MEMS) devices come with the tide of fashion. Three examples are discussed in detail in this paper: CMOS compatible sensors, RF/microwave components, and packaged and integrated passives devices. The design thinking of a new free-fall sensor, which is an accelerometer and possesses a surprisingly low frequency response and broad bandwidth, is mentioned. In addition, an AVID (A___dvanced V___ibrometer/I___nterferometer D___evice) system for measuring tiny displacement and a Morphinscope system which has the advantages of a confocal microscope combined with a photon tunneling microscope, both developed by NTU's MEMS/NEMS group are discussed. The excellent sensing ability of the free-fall sensor and the accuracy resolution of the two measurement systems are proved by experimental verification.

• 社団法人電子情報通信学会の論文
• 2002-11-07

著者

• Wu W‐j

  Institute Of Applied Mechanics National Taiwan University

• CHANG Pei-Zen

  Institute of Applied Mechanics, National Taiwan University

• Chang Pei-zen

  Institute Of Applied Mechanics National Taiwan University

• WU Wen-Jong

  Institute of Applied Mechanics, National Taiwan University

• HUANG Long-Sun

  Institute of Applied Mechanics, National Taiwan University

• Lee Chih-Kung

  Faculty, Institute of Applied Mechanics, National Taiwan University

• Chang Pei-Zen

  Faculty, Institute of Applied Mechanics, National Taiwan University

• Huang Long-Sun

  Faculty, Institute of Applied Mechanics, National Taiwan University

• Wu Wen-jong

  Institute Of Applied Mechanics National Taiwan University

• Huang Long-sun

  Institute Of Applied Mechanics National Taiwan University

• Lee Chih-kung

  Faculty Institute Of Applied Mechanics National Taiwan University

• Leg Chih-Kung

  Institute of Applied Mechanics, National Taiwan University

• Leg Chih-Kung

  Faculty, Institute of Applied Mechanics, National Taiwan University

関連論文

• In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University(Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
• Invited paper System Perspective of Electromechanical Devices Development (国際セッションIS-EMD2002〔英文〕)
• A High Performance Doppler Interferometer for Advanced Optical Storage Systems
• System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
• Microstructural Fabrication for Measuring Residual Strains of CMOS Thin Films
• Sensor and Actuator Interaction for Nanometer Positioning Microactuators (国際セッションIS-EMD2002〔英文〕)
• Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems
• In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
• Novel Method for In Situ Monitoring of Thickness of Quartz during Wet Etching

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