In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-15
著者
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LEE Chi-Yuan
Department of Mechanical Engineering, National Taiwan University
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CHENG Ying-Chou
Department of Mechanical Engineering, National Taiwan University
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CHEN Yung-Yu
Institute of Applied Mechanics, National Taiwan University
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CHANG Pei-Zen
Institute of Applied Mechanics, National Taiwan University
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WU Tsung-Tsong
Institute of Applied Mechanics, National Taiwan University
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CHEN Ping-Hei
Department of Mechanical Engineering, National Taiwan University
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CHEN Wen-Jong
Institute of Applied Mechanics, National Taiwan University
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PAO Shih-Yung
Institute of Applied Mechanics, National Taiwan University
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