Novel Integration Approach for In situ Monitoring of Temperature in Micro-direct Methanol Fuel Cell

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概要

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• In this work, a porous silicon layer is fabricated as the gas diffusion layer (GDL) of a micro-direct methanol fuel cell (μDMFC) using micro-electro-mechanical-systems (MEMS) technology. Platinum is deposited on surface of the porous silicon layer to improve the electrical conductivity of the μDMFC. Physical vapor deposition (PVD) was utilized to deposit Pt metal and wet etching was adopted to form the conductive layer and micro-thermal sensors. The Pt acted both as a current collector and a micro-thermal sensor. We fabricated a resistance temperature detector (RTD) sensor for integration with the gas diffusion layer on the bipolar plate to measure the temperature inside the μDMFC. GDLs with pores of various sizes (10, 30, and 50 μm) were considered to test the performance of the μDMFC. A silicon wafer (500 μm) was etched using KOH wet etching to yield fuel channels with a depth of 450 μm and a width of 200 μm. Then, a porous silicon layer was formed by deep reactive ion etching (DRIE) to act as the GDL of the μDMFC. The experimental results obtained at various fuel flow rates, pore sizes and other operating conditions demonstrate that the maximum power density of the μDMFC is 1.784 mW/cm2, which was reached at 203 mV with 50-μm-diameter holes. The microsensor temperature was determined to be in the range from 20 to 46 °C and the resistance of the microsensor was in the range from 7.524 to 7.677 k$\Omega$. Experimental results demonstrate that temperature is almost linearly related to resistance and that accuracy and sensitivity are 0.3 °C and $7.82\times 10^{-4}$/°C, respectively.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-10-15

著者

• LEE Chi-Yuan

  Department of Mechanical Engineering, National Taiwan University

• Lee Chi-Yuan

  Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Huang Ren-De

  Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Chuang Chih-Wei

  Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

• Lee Chi-Yuan

  Department of Mechanical Engineering, Fuel Cell Research Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.

関連論文

• In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
• Novel Integration Approach for In situ Monitoring of Temperature in Micro-direct Methanol Fuel Cell
• In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor
• Novel Method for In Situ Monitoring of Thickness of Quartz during Wet Etching
• Novel Method for Measuring Temperature Distribution within Fuel Cell using Microsensors

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