Surface Acoustic Waves in Layered Piezoelectric Medium Loaded with Viscous Liquid

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概要

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• In this paper, we present an analysis of the velocity dispersion and wave attenuation of a layered piezoelectric medium loaded with a viscous liquid. The eight-dimensional formalism of the surface wave and the recursive formula were adopted to obtain the impedance tensor of a piezoelectric layered half-space and that of viscous liquids. The dispersion equation of the surface waves in such a layered system was formulated under the continuity conditions at the solid-liquid interface. Numerical examples of half-space (lithium niobate), single-layered (lithium niobate/sapphire) and double-layered half-space (ST-cut quartz/lithium niobate/sapphire, lithium niobate/ST-cut quartz/sapphire) loaded with a viscous liquid are presented and discussed as well.

• 社団法人応用物理学会の論文
• 2002-08-15

著者

• WU Tsung-Tsong

  Institute of Applied Mechanics, National Taiwan University

• Wu T‐t

  National Taiwan Univ. Taipei Twn

• Wu Tsung-tsong

  Institute Of Applied Mechanics National Taiwan Univ.

• Chang Meng-ping

  Institute Of Applied Mechanics National Taiwan University

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• Surface Acoustic Waves in Layered Piezoelectric Medium Loaded with Viscous Liquid
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• In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor

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