Improvement in Structural and Electrical Properties of (Ba0.5Sr0.5)TiO3 Capacitors Using (Ba0.5Sr0.5)RuO3 Conductive Layers at (Ba0.5Sr0.5)TiO3/Pt Interface
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概要
- 論文の詳細を見る
BST thin films and BSR interlayers were deposited by pulsed laser deposition (PLD) and liquid-delivery metalorganic chemical vapor deposition (LDMOCVD) onto Pt/TiO2/Si substrates, respectively. Ultrathin BSR conductive layers were inserted at the BST/Pt interface to improve the dielectric properties of BST thin films. BST films deposited on ultrathin BSR interlayers showed an improvement in roughness and microstructure compared with those without BSR layers in an overall range of BST film thickness. The temperature-independent interface capacities in BST/Pt and BST/BSR/Pt structures are approximately 8.9 and 20 μF/cm2, respectively. The dielectric properties of BST films were improved by the increase in interface capacity as well as roughness and microstructure using the BSR conductive layer which is similar to BST in crystal structure and chemical composition.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
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Yoon Soon-gil
Department Of Materials And Engineering Chungnam Notional University
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OH Young-Nam
Department of Materials Engineering, Chungnam National University
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YOON Soon-Gil
Department of Materials Engineering, Chungnam National University, Daeduk Science Town, Daejon, 305-764, Korea
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OH Young-Nam
Department of Materials Engineering, Chungnam National University, Daeduk Science Town, Daejon, 305-764, Korea
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