Spectro-Ellipsometry Investigation of Cascaded Crystallization Behavior of Phase-Change Ge–Sb–Te Alloy
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概要
- 論文の詳細を見る
The cascaded crystallization behavior of phase-change Ge–Sb–Te alloy films has been confirmed by spectroscopic ellipsometry. The evolution of crystallinity analyzed by spectro-ellipsometry showed strong correlation with that revealed by the X-ray diffraction patterns. The depolarization effect in each stage of the cascaded crystallization process is discussed.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-30
著者
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Jeong Tae
Devices & Materials Laboratory Lg Electronics Institute Of Technology
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Seo Hun
Devices & Materials Research Lab., LG Corporate Institute of Technology
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LIM Hanjo
Department of Molecular Science & Technology, Ajou University
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Lah Sang
Department Of Chemistry Ajou University
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Park Young
Department Of Biology Kyung Hee University
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KIM Sang
Department of Anesthesiology and Pain Medicine, Chosun University Medical School
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Park Young
Department of Chemistry, Ajou University, Suwon 442-749, Korea
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Lim Hanjo
Department of Molecular Science & Technology, Ajou University, Suwon 442-749, Korea
-
Jeong Tae
Devices & Materials Laboratory, LG Electronics Institute of Technology, Seoul 137-724, Korea
-
Seo Hun
Devices & Materials Laboratory, LG Electronics Institute of Technology, Seoul 137-724, Korea
-
Lah Sang
Department of Chemistry, Ajou University, Suwon 442-749, Korea
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KIM Sang
Department of Agricultural Biotechnology, Seoul National University
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