A Novel Simplified Process for Self Aligned Planar Wrapping Gate FET's with Directionally Crystallized Si Channel Processed via Sequential Lateral Solidification
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概要
- 論文の詳細を見る
- 2005-09-13
著者
-
Woo Jason
Department Of Electrical Engineering University Of California
-
Park Young
Department Of Biology Kyung Hee University
-
Park Young
Department Of Electrical Engineering University Of California
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