Source/Drain Extension-to-Gate Overlap Scaling in Deep Sub-Micron MOSFETs
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Woo Jason
Department Of Electrical Engineering University Of California
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Deshpande H.
Department Of Electrical Engineering University Of California
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Inani A.
Department Of Electrical Engineering University Of California
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Krishnan S.
Technology Development Group Advanced Micro Devices
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LIN M.-R.
Technology Development Group, Advanced Micro Devices
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Lin M.-r.
Technology Development Group Advanced Micro Devices
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- Source/Drain Extension-to-Gate Overlap Scaling in Deep Sub-Micron MOSFETs
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