Investigation of Crystallization Behavior of Sputter-Deposited Nitrogen-Doped Amorphous Ge_2Sb_2Te_5 Thin Films
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概要
- 論文の詳細を見る
The crystallization behavior of nitrogen-doped amorphous Ge_2Sb_2Te_5-(N) phase-change thin films was studied utilizing differential scanning calorimetry, in situ ellipsometry and in situ transmission electron microscopy. The combined analysis of in situ ellipsometry isotherms of amorphous Ge_2Sb_2Te_5-(N) films and the Johnson-Mehl-Avrami equation revealed that the crystallization process of amorphous Ge_2Sb_2Te_5-(N) films changes depending on the nitrogen content. The crystallization behavior of Ge_2Sb_2Te_5 films revealed a two-step process that includes spherical-nucleation and disc-shaped grain growth. In contrast, nitrogen-doping into Ge_2Sb_2Te_5 thin films suppresses the second step and the crystallization of Ge_2Sb_2Te_5-(N) becomes a one-step process that is the primary nucleation process. The number of nucleation sites during the crystallization of amorphous Ge_2Sb_2Te_5-(N) films, increased markedly with the annealing temperature in the spherically shaped nuclei and eventually saturated. The effective crystallinity of Ge_2Sb_2Te_5-(N) alloy films decreased with the increase in nitrogen content, mainly due to the grain-size refinement.
- 社団法人応用物理学会の論文
- 2000-02-28
著者
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Seo Hun
Devices & Materials Research Lab., LG Corporate Institute of Technology
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Yeon Cheong
Devices & Materials Research Lab., LG Corporate Institute of Technology
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Seo Hun
Devices And Materials Laboratory Lg Corporate Institute Of Technology
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Yeon Cheong
Devices And Materials Laboratory Lg Corporate Institute Of Technology
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JEONG Tae-Hee
Devices and Materials Laboratory, LG Corporate Institute of Technology
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PARK Jeong-Woo
Devices and Materials Laboratory, LG Corporate Institute of Technology
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KIM Sang-Jun
Department of Molecular Science and Technology, Ajou University
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KIM Sang-Youl
Department of Molecular Science and Technology, Ajou University
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Kim S‐y
Fab Division Anam Semiconductor Co. Inc.
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Kim Sang-jun
Department Of Molecular Science And Technology Ajou University
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Jeong Tae-hee
Devices And Materials Laboratory Lg Corporate Institute Of Technology
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Park Jeong-woo
Devices And Materials Laboratory Lg Corporate Institute Of Technology
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