Discharge Produced Plasma Extreme Ultra-Violet Source with Hollow Cathode
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概要
- 論文の詳細を見る
A pinch plasma has been formed by using a hollow inner electrode with negative polarity. Extreme ultra-violet (EUV) emission was detected from this pinch plasma. The diagnostic results were compared with that obtained with a part of outer electrode was covered with insulator. It is found that the discharge initiated between the hollow cathode and the grounded outer electrode without a creeping discharge. The hollow cathode pinch discharge was operated with energy of $\sim$8.5 J/pulse, indicating potential application for compact EUV source.
- 2007-05-25
著者
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Oshima Nobuaki
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Kimura Toru
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Jiang Weihua
Extreme Energy Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
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Kimura Toru
Extreme Energy-Density Research Institute, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka, Niigata 940-2188, Japan
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