Synthesis of AlN Grains and Liquid-Phase-Epitaxy (LPE) Growth of AlN Films Using Sn-Ca Mixed Flux
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概要
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AlN grains were synthesized using a Sn-Ca alloy flux. Conditions under which AlN grains could be synthesized were investigated by varying the flux composition (Ca:Sn) and the ratio of Al to flux. The Sn-Ca mixed flux enabled us to synthesize AlN grains under the relatively mild conditions of 900°C and 5 atm. We also attempted homoepitaxial liquid-phase epitaxy (LPE) growth on an AlN(0001) thin film grown on a sapphire(0001) substrate by metalorganic chemical vapor deposition (MOCVD) and obtained 1.8-μm-thick-AlN film in the liquid phase.
- Japan Society of Applied Physicsの論文
- 2005-04-10
著者
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Isobe Hiroaki
Graduate School Of Electrical Engineering Osaka University
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KAWAMURA Fumio
Graduate School of Pharmaceutical Sciences, Nagoya City University
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KAWAHARA Minoru
Graduate School of Electrical Engineering, Osaka University
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Mori Yusuke
Graduate School Of Bionics Tokyo University Of Technology
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Isobe Hiroaki
Graduate School of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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YOSHIMURA Masashi
Graduate school of Electrical Engineering, Osaka University
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SASAKI Takatomo
Graduate school of Electrical Engineering, Osaka University
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Kawahara Minoru
Graduate School of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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