RF Near Field Microscopy of a Coplanar Waveguide with AM-MFM

概要

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This paper proposes our newly measurement method of the GHz range near field from a coplanar waveguide (CPW) using a Ni‐Fe coated magnetic force microscope tip and amplitude modulation of the line current. Cantilever resonance frequency modulation of approximately 25 kHz supplies the CPW with current and carrier frequencies up to 1.0 GHz. The CPW has a signal line width of 3 μm and a ground line width of 50 μm. The RF magnetic near field was evaluated from the difference in the oscillation amplitudes of the tip with and without Ni-Fe coating for a carrier frequency range up to 1.0 GHz, and became maximum near the center of gap on the CPW. This result also suggests that this method may be applicable to high resolution measurements of the magnetic near field distribution near RF power lines and ground lines, which have downsized for microscale radio frequency integrated circuit (RFIC) chips.