熱陰極電離真空計のX線限界改善法

概要

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A new method is proposed for improvement on soft x-ray limit of a Bayard-Alpert type hot cathode ionization gauge. In a gauge with an open end grid and an x-ray shielding plate having a hole for ion extraction, it is found that the ion collector electrode placed at a suitable distance beneath the hole can be effectively protected from the illumination of x-ray flux directly from the grid surface. A hemispherical ion reflector and a pair of flat plates placed each other with a slight gradient are also examined about their behavior as an x-ray reflector. The gauges of different types are proposed. A modified extractor gauge with the open end grid and hemispherical x-ray reflector, which consists of a part of glass envelope of the test tube, was examined experimentally and the sensitivity of 7-8 Torr <SUP>-1</SUP> was obtained.
日本真空協会の論文