熱陰極電離真空計の比感度係数 (1) : 衝立型電離真空計

概要

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This paper proposes a new method for the derivation of relative sensitivity coefficient of a hot cathode ionization gauge. The coefficient is derived from the total ionization cross section of the sample gas with the aid of the (l-V) distribution data relevant to the ionizing electrons. The (l-V) distribution has been newly adopted upon the concept that it signifies characteristics inherent to the hot cathode ionization gauge. It gives the path length li of an electron which contributes to ionization in terms of its energy eVi. The path length li is computed from the (Vaf-I+) characteristics which are experimentally measured upon the rationale of the law of scaling which predicts the invariance of electron path configurations under proportional alteration of all electrode voltages. The Fogel and Schulz gauges were measured of their (Vaf-I+) characteristics. The (l-V) distribution of each gauge was determined by the fitting method. Relative sensitivity coefficients of fourteen gases were calculated for these gauges. They showed good agreement with the calibrated values.
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