簡単なゲッターイオンポンプに関する実験

概要

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A glass enveloped Penning type cold cathode ionization gauge, having a latticed anode with three cells and a cathode with two sheets of titanium plate, was fabricated for trial use as a getter-ion pump.<BR>The pumping speed was measured as a function of the anode voltage, the magnetic field strength, and the pressure. The speed at moderate operating conditions was about 1 liter per second. Existence of linearity between pressure and discharge current was ascertained. Hysteresis phenomena, i. e., the pump's memory of its previous conditions was observed in the measurement of pumping characteristics. An ultimate pressure of 10<SUP>-9</SUP> mmHg was obtainable without special difficulty.<BR>Practical usefulness of such a small getter-ion pump was established in our laboratory. As an example of its application, processing of an ordingry thermionic tube on exhaust is shown.
日本真空協会の論文