TiNセラミック膜の局所伸びの発生位置による形態の相違

概要

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Although it is generally believed that the ceramic material is brittle and is very different in deformation behevior from metallic materials, the present experimental evidence upsets this view by showing that small elongated areas of TiN formed across cracks in a TiN ceramic film during 180° bend-forming. The TiN sample (about 1 μm thick) was deposited on a stainless steel sheet (Type 430 : 16.7% Cr) by the hollow cathode discharge (HCD) method, forming the epitaxial growth of the small areas of (001) [100] TiN cube orientation on minor and (001) [110] stainiess steel grains. The sample was bend-formed causing cracks perpendicular to the direction of tension, and examined by scanning electron microscope (SEM). The elongated morphology of TiN greatly differed at the generation position; the TiN film surface and 30 μm depth beneath the surface.
日本真空協会の論文
2003-03-20