ホローカソード放電を用いたイオンプレーティング法によるTiN被覆一方向性珪素鋼板の磁気特性に及ぼすHe放電ガスの影響

概要

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In order to establish the influence of He discharge gas on the magnetic properties of TiN-coated silicon steel sheets, TiN films were deposited on polished silicon steel sheets by ion plating using Ar and He plasma electron beams. The differences in the thin-film X-ray diffraction patterns and color between TiN films deposited using the He and Ar plasma electron beams were very slight, and there was no difference in the surface roughness and composition of the TiN films. However, the iron loss [W17/50] from the TiN-coated silicon steel sheets deposited using the He plasma electron beam was in the degree of 0.01-0.02 W/kg less than using the Ar plasma electron beam. It is considered that there is only a slight advantage using the He plasma electron beam in place of the Ar one in terms of the magnetic property, since there exist the difficulty of beam control in beam-starting and the cost of plasma coating when using He gas.
日本真空協会の論文
1997-09-20