グリーンシートの粉体充填率とバインダ量がアルミナ基板の寸法精度,反りに及ぼす影響

概要

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The relations among packing density in Al2O3 green sheet and shrinkage, demensional stability and warping were discussed theoretically and experimentally. Dimensional stability in Al2O3 substrate strongly depended on packing density of particles in the green sheet and was experimentally varied by 0.5% when the packing density was changed around 1 vol%. These experimental values were fairly agreed with those obtained by theoretical considerations. Moreover, it was found that the warping observed in the sintered substrate was caused by the difference of shrinkage in thickness direction, which was due to the variations of packing density and binder content in thickness direction. This variation could be controlled around zero using the green sheet with a packing density of above 60 vol%. We could get the Al2O3 substrate with high dimensional stability.
社団法人粉体粉末冶金協会の論文