アルミナの粒径とフラックスの比表面積がアルミナ基板の焼結特性に及ぼす影響

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We studied the effects of alumina particle diameter and flux specific surface area on the sinterability of alumina substrate in relation with the powder packing density.<BR>Alumina particle diameter and flux specific surface area were varied within the ranges from 0.5 to 3.6μm and from 1 to 100 m<SUP>2</SUP>/g, respectively. The larger the alumina particle diameter, the higher became the minimum sintering temperature. The minimum sintering temperature of alumina substrate decreased by about 50°C when agglomerated particles were pulverized and packing density was improved. On the other hand, the effect of flux specific surface area was insignificant on minimum sintering temperature. Saturated sintered density remained almost unchanged when the alumina particle diameter was varied.<BR>However, it became higher when agglomerated alumina particles were pulverized. Surface smoothness was improved significantly when agglomerated particles were pulverized and hence the green sheet packing density increased.
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