Influences of Film Deposition Condition on Friction of Diamond-Like Carbon Film: A Theoretical Investigation
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概要
- 論文の詳細を見る
We theoretically investigated influences of film deposition condition on a friction of diamond-like carbon (DLC) film using our developed molecular dynamics method. The method can deal with chemical reactions on the basis of our original stochastic equation. DLC slab model was firstly constructed, and carbon atoms were deposited onto its surface with various kinetic energies (1, 10 and 30 eV) to mimic physical vapor deposition process. Lower sp3 carbon concentration and density were obtained for the 1 eV case and “subplantation” phenomenon was found for each model. The dynamical friction of the deposited DLC film/iron oxide combination was also simulated. The friction coefficient for the deposited film with kinetic energy of 1 eV was much lower than that of 10 and 30 eV cases due to the friction-induced structural change. The simulations provided us an important insight on DLC film preparation to achieve low friction regime.
- 社団法人 日本トライボロジー学会の論文
著者
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Tsuboi Hideyuki
Department of Cardiology, Ogaki Municipal Hospital
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久保 百司
東北大学大学院工学研究科
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Onodera Tasuku
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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Kuriaki Takanori
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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Bai Shandan
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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Nagumo Ryo
New Industry Creation Hatchery Center, Tohoku University
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Miura Ryuji
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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Suzuki Ai
New Industry Creation Hatchery Center, Tohoku University
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Hatakeyama Nozomu
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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Endou Akira
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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Takaba Hiromitsu
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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Kubo Momoji
Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
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Miyamoto Akira
New Industry Creation Hatchery Center, Tohoku University
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Suzuki Ai
New Ind. Creation Hatchery Center Tohoku Univ.
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Takaba Hiromitsu
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Tsuboi Hideyuki
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Endou Akira
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Hatakeyama Nozomu
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Onodera Tasuku
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Miura Ryuji
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 6-6-11-1302 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Miyamoto Akira
New Industry Creation Hatchery Center (NICHe), Tohoku University, 6-6-10 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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