2点同時変位測定に基づく圧電薄膜の材料特性評価法の提案

概要

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A material properties estimation method was proposed for piezoelectric thin films fabricated on substrates. The proposed method can present piezoelectric strain constant d333 on basis of displacement difference between top and bottom points of specimen under external electric field with a disc-type electrode. In this paper, its availability was verified with finite element method. Thicknesses of piezoelectric thin film and substrate were changed and the mechanical and electrical behavior was computationally analyzed to get dual-points concurrent displacement. Then piezoelectric strain constant was estimated from the simultaneous equation in consideration of piezoelectric and Poissons effects. As a result, the errors of the estimated values under static and dynamic electric fields were 1.1 % and 4.1%, respectively.
日本材料学会の論文