406 新規生体適合圧電薄膜創製のための第一原理トリプルスケール解析手法の開発(T03-2 マイクロナノ理工学:nmからmmまでのテクスチャリングの創成と機能(2),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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We developed first-principles based triple-scale analysis method for a new biocompatible piezoelectric thin film. At first, the crystal growth potential of piezoelectric thin film fabricated on various substrates was evaluated by first-principles calculation based on the process crystallography. Next, macro piezoelectric properties of thin film were calculated by finite element analysis through the homogenization method. For BaTiO_3 thin films, we indicated a first-principles triple-scale analysis enabled us to evaluate the experimental preferred orientation and the piezoelectric properties. Additionally, we applied new biocompatible MgSiO_3 thin film. As a result, we exhibited that Cr(110) substrate was best substrate and piezoelectric stress constants was e_<33>=5.39C/m^2.
2008-08-02