プラズマイオン注入におけるトレンチ形状基材のシースの形成と動的挙動

概要

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An experiment on the Plasma-Based Ion Implantation (PBII) has been performed using a trench-shape model electrode in order to clarify the geometrical effect of the workpiece on the ion sheath dynamics and on the spatial distribution of ions incident upon the workpiece. The ion current (which includes the secondary electron current) is measured on the top, side and bottom surfaces of the electrode simultaneously. The condition for the trench not to be filled with the ion sheath is derived analytically by applying the model of cylindrical sheath evolution. Experimental observations show good consistency with this condition ; that is, the sheath is formed along the inner surface of the trench without the sheath overlapping and almost the same amount of ion flux is detected on the top, side and bottom surfaces if the condition is satisfied. Furthermore, the trench-shape electrode is found to require much longer time period than the planar one for the initial plasma density distribution to be recovered after the voltage pulse is terminated. This suggests that the geometry of the workpiece affects the maximum repetition rate and therefore the efficiency of PBII.
社団法人電気学会の論文
2003-04-01