MNM-4B-5 変位増幅機構を有するMEMS触覚ディスプレイの開発(セッション 4B マイクロ・ナノ技術によるロボティクス・メカトロニクスの新展開)

概要

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We demonstrate an efficient tactile display consisting of large-displacement MEMS actuator arrays. Tactile information is transferred by stimulating finger tactile receptors by the actuators at various spatial and temporal frequencies. The large displacement is realized by hydraulic displacement amplification mechanisms (HDAM). Static and dynamic characteristics of HDAM were investigated and 18- and 11-fold amplification were achieved in static and dynamic (at 70 Hz) actuation, respectively. We applied actuator arrays consisting of HDAM and piezoelectric actuators to Braille code display, which is one of tactile displays. Owing to the characteristics of finger tactile receptors being more sensitive to vibrational stimuli than static ones and the natural frequency of HDAM, vibrational actuation at 70 Hz, which required a low voltage of 30V for subjects to detect the code, were more efficient than static actuation, which required 65V, and vibrational actuation at other frequencies.
2010-10-12