T1501-2-1 鉄系金属/ダイヤモンドの熱化学反応を利用した単結晶ダイヤモンドの加工(マイクロ・ナノ技術のロボティクス応用(2))

概要

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Demands for sub-meso scale devices from millimeters to sub-millimeter in size are rapidly growing. However, currently we have no effective methods of manufacturing these devices. We aim at development of ultra fine single-crystal diamond tools that are high precision, mass producible and low costs. In this paper, we propose the processing principle of a single-crystal diamond using photolithography process and thermochemical reaction with sidero-metal based on the processing experiments with various conditions and surface element analysis. We have elucidated that our processing is initiated by the diffusion of carbon into the metal and then promoted by the owidation of diamond. The etching rate of diamond increases with the annealing temperature, and we ascertain that annealing temperature should be less than 1150K to prevent combustion of diamond. Additionally, we found that the etching rate depended on the crystal orientation.
一般社団法人日本機械学会の論文
2009-09-12