M2-5 LIGAプロセス用高強度電鋳Ni合金の開発と微小試験片による疲労強度特性(M2 材料評価)

概要

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LIGA process is one of the most promising methods to fabricate metallic micro structures for MEMS and various mechanical components such as IC probes and a micro spray nozzle. The process is composed of photolithography and electroforming of metals and alloys such as Ni and Ni-Co. In the present study, we developed new electroformed Ni-Pd alloy and confirmed its superior mechanical properties in tensile strength of 2.2 GPa and fatigue strength of 1.8 GPa. A palmtop tensile testing machine and a fatigue testing machine were especially developed for small thin specimens fabricated by LIGA process. The stiffness of the specimens were quite low compared with the conventional large-sized specimens, so the machines were especially designed in dimensions of the specimens, loading mechanism, and the measuring method of load and displacement.
2009-10-15