2125 金属ガラスを用いた反射型干渉光学素子の開発(S29-1 マイクロ/ナノ加工の動向と可能性(1),S29 マイクロ/ナノ加工の動向と可能性)

概要

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Metallic glasses are useful for fabricating nanodevices due to their low viscosity and homogeneity on nanometer scales. In this study, we developed optical components of metallic glass by superplastic nanoforming. Metallic glasses exhibit Newtonian viscous flow in a supercooled temperature range between the glass transition temperature and the crystallization temperature. This study used Pt-based metallic glass with a glass transition temperature of 502K. This material was applied to reflective interference optical components, and a diffraction grating (1μm interval) and a hologram were fabricated by superplastic nanoforming. Dies were made by Ni-electroforming, with master models fabricated by photolithography of the interference pattern. The working temperature of Pt-based metallic glass was 540K under a compressive stress of 10MPa. The results demonstrated the advantages of the superplastic nanoforming technique on metallic glass and for mass production of optical components.
社団法人日本機械学会の論文
2005-09-18