2124 急速加熱下におけるZr基金属ガラスの挙動とマイクロ成形加工装置の開発(S29-1 マイクロ/ナノ加工の動向と可能性(1),S29 マイクロ/ナノ加工の動向と可能性)

概要

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Superplastic forming of metallic glasses is useful for fabricating micro- and nano-devices. In the present paper, we studied glass transition and crystallization phenomena in Zr_<55>Al_<10>Cu_<30>Ni_5 metallic glass under rapid heating, at a rate of up to 10^6 K・s^<-1>. This material exhibits Newtonian viscous flow between the glass transition temperature T_g and the crystallization temperature T_x. During the heating, T_g and T_x increase and the normal viscosity λ decreases with increasing heating rate. As an application of this phenomenon, characteristic micro forming should be performed during rapid heating, at very high strain rates and under very low stresses, we developed a new micro forming system based on the characteristic behavior of Zr-based metallic glass under rapid heating. Using this apparatus, micro forging was carried out within a few seconds. Thus, the system would be most effective in the mass production of micro parts for MEMS.
社団法人日本機械学会の論文
2005-09-18