124 FIB加工によるナノ金型の創製と金属ガラスのナの成形加工(OS 新材料の加工技術(2))

概要

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From the aspect of production engineering, forming processes of metals, alloys, oxide glasses, metallic glasses and polymers offer a significant advantage in productivity and enable mass production of nanoVmicro-machines (NEMS, MEMS) and devices with controlled quality and low cost. Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. The present paper describes the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of glassy carbon and Zrbased metallic glass fabricated by focused-ion-beam(FIB) technology. It was found that nano-formability of Pt'based metallic glass with Zrbased metallic glass dies is better than that forged with glassy carbon dies. Dies and the die forged 100nm-module micro gear, 200nm-width logo characters are demonstrated.
社団法人日本機械学会の論文
2004-11-05