429 UV-LIGA/Ni電鋳により創製されたマイクロばね要素の繰返し荷重下の挙動(OS 材料の超精密加工・マイクロ加工)

概要

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Micro springs of Ni was fabricated by UV-LIGA(UV-lithography and electroforming) process. The spring was S-shaped and was 1 mm high, 0.85 mm wide and 50 μm thick. For the purpose of detecting the spring characteristics and fatigue strength, new testing machine was developed as a microfactory cell. This system is characterized by its static and dynamic, repeated loading mechanism. A moving coil electromagnetic linear motor is used as a loading mechanism, and the load is calculated by the current of the coil that is supported by a parallel plate spring structure. The displacement of the moving coil is measured with a linear differential transformer installed in the loading unit. Using this apparatus, we measured the spring characteristics and confirmed good agreement between the experimental and FEM-designed characteristics of the spring. The fatigue tests were carried out on the microsprings. As a result, this test system is useful for investigating fatigue strength and detecting microstructural changes.
一般社団法人日本機械学会の論文
2001-11-02