339 UV-LIGA/Ni電鋳マイクロダイによるアモルファス合金の押出し加工(塑性加工)

概要

論文の詳細を見る
This study seeks to establish microforming technologies for micro-electro-mechanical-systems (MEMS) parts such as a microgear. For this purpose, UV-LIGA process is applied to the microfabrication of micro-dies. UV-LIGA process is one of the fabrication processes for high aspect ratio microstructures. In the present study, a negative-tone, near-UV resist SU-8 was used for photolithographic fabrication of microgear models. Micro-dies for superplastic forming were fabricated by subsequent electroforming of Ni. With this micro-dies, micro-exrusion was carried out with specially developed extruding machine. The selected material was Pd_<40>Cu_<30>Ni_<10>P_<20> amorphous alloy and was formed superplastically in its supercooled liquid state to a microgear of 10 micrometers in module. As a result, these processes are useful for fabrication of micro-parts for micromachines.
一般社団法人日本機械学会の論文
2000-06-23