21014 圧電結晶を利用したマイクロ実験室の開発 : SAWによる液滴搬送現象の新しい応用(原子力と材料・構造・組織(3),OS.4 原子力と材料・構造・組織)

概要

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When a liquid droplet is loaded onto a surface acoustic wave (SAW) propagating surface, a longitudinal wave is generated into the droplet. The radiated longitudinal wave induces liquid dynamics. This phenomenon is called SAW streaming. In this paper, SAW streaming phenomena are summarized. Then a novel micro-laboratory on a piezoelectric substrate is proposed and demonstrated. On the micro-laboratory, a droplet is moved by the SAW streaming and measured by a sensor, which is integrated on a surface. In this paper, we propose three-layer structure micro-laboratory, which is consisted of sensor plate/matching layer/piezoelectric substrate. The IDT is fabricated on the piezoelectric substrate and sensor is on the sensor plate. In this paper, interdigitated electrode (IDE) sensor is used to measure an impedance of a liquid.
2009-03-05