113 金属ナノ粒子レーザ焼結法による導電回路形成法の開発(超塑性と材料および造形法)

概要

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In this study, an attempt was made to investigate direct minute wiring by means of ink-jet printing with Ag NanoPaste^<[○!R]>and its laser sintering. First, line patterns were drawn on a Cu substrate by ink-jet printing with the paste:about 80μm in width and about 2μm in thickness. Then, the specimen was dried at 170℃ for 20min to anchor the paste. Finally, laser sintering of the dried pattern was carried out twice in a row by scanning a beam at average laser powers of 1.99W and 4.45W in air, where a pulsed Nd:YAG laser of 1.06μm wavelength and 0.1mm spot diameter was used. As a result, the nano-sized Ag particles(5nm in average diameter)dispersed in the paste are welded to form coarse Ag agglomerates of around 0.4μm. A bend-peel test of the specimen shows that adhesion strength is too high to take place any separation between the sintered wire and the substrate.
社団法人日本機械学会の論文
2006-09-14