21005 ピコ秒レーザ照射によるステンレス基板へのマイクロプリズム加工(原子力と材料・構造・組織(1),OS.4 原子力と材料・構造・組織)

概要

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An attempt has been made to manufacture a recursive mirror for the optical measurement of soundness of a mercury-target vessel that is to be installed in the J-PARC project at the JAEA. The mirror is comprised of dozens of reentrant pyramids as large as about 100 μm in length. In order to make such a micro shape directly on a stainless steel substrate, we used a short pulsed Nd:YAG laser with 1.06 μm wavelength to achieve resolutions of 20 μm in width and 2 μm in depth for the laser ablation. Its feasibility has been confirmed by manufacturing a three-dimensional structure constructed from two layered triangles. The size and depth of first and second layer of the structure are about 330 μm and 180 μm in width and about 47 μm and 20 μm in depth under the conditions of a pulse energy of 20 μJ, a scanning speed of 2 μm/s, and a hatching width of 10 μm.
社団法人日本機械学会の論文
2009-03-05