2723 高品質パターン形状ダイヤモンドCVD膜の形成技術(S33-3 材料の超精密加工とマイクロ/ナノ加工の動向(3),S33 材料の超精密加工とマイクロ/ナノ加工の動向)

概要

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In this study, after controlling the nucleation position and form of a CVD diamond film where the application to a field will probably be expected from now on, film growth which is selective and a specific pattern is tried. Moreover, growth of high nucleation density and high quality diamond film for a short time is made into the target. Therefore each substrate pretreatment technology was tried and development of the formation technologyfor forming a precise, flat and smooth film is performed. Especially, as the new technology which can control a nucleationposition, the new pretreatment method that the ultrasonic vibration is added to movement of the small ball made from stainless steel is developed.
社団法人日本機械学会の論文
2006-09-15