Mn-Zn系フェライトのラッピング加工に関する研究 : 第1報,削除率および加工面性状に及ぼす固定および遊離砥粒の影響

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This paper describes the effect of the motion of diamond grains on the material removal rate and surface roughness in the lapping of Mn-Zn polycrystalline ferrite using a Sn lapping plate and 0.3μm diamond abrasives. The diamond grains can be classified into fixed and loose grains. The grains fixed to a lapping plate were confirmed by SEM and AFM observations. Among many experimental parameters, the change of the pitch of fine grooves on a lapping plate formed by the facing operation has a significant effect on the removal rate. This agrees well with the calculated number of loose grains under various pitches of groove. The average removal rate with fixed and loose grains was found to be about 2.7 times higher than that with only fixed grains. These results indicate that during lapping, the material is mainly removed by loose grains. It is evident from AFM images that the lapped surface with material removed by fixed grains differs very much from that with material removed simultaneously by fixed and loose grains.
社団法人日本機械学会の論文
1995-07-25