Determination of Ultrathin Oxide Thickness by Subthreshold Swing
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概要
- 論文の詳細を見る
Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N_20 or 0_2.
- 社団法人応用物理学会の論文
- 2002-05-15
著者
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Chao T‐s
Department Of Electrophysics National Chiao Tung University:national Nano Device Labs. Hsinchu Taiwa
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Chao Tien-sheng
Department Of Electrophysics National Chiao Tung University
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