Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber : Fundamental Analysis of the Optical Fiber Trapping(Nano/micro measurement and intelligent instrument)
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概要
- 論文の詳細を見る
A novel three-dimensional probing technique for micro parts with high aspect ratios is proposed. In this technique, a particle trapped optically at the optical fiber tip is used as a probe for position detection. Numerical analysis about the optical force and detection signal were demonstrated by using finite difference time domain method (FDTD) and Maxwell stress tensor. And also fundamental optical fiber trapping experiments were demonstrated in the water. For the first, a probe sphere was levitated by illumination from the laser, and laser light emitted from the optical fiber successfully trapped the probe sphere three-dimensionally.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Miyoshi Takashi
Department of Mechanical Engineering and Systems, Osaka University
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Takaya Yasuhiro
Department of Mechanical Engineering and Systems, Osaka University
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Miyoshi Takashi
Department Of Mechanical Engineering And Systems Osaka University
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Miyoshi Takashi
Department 4 Technology Research Division 2 Honda R&d Co. Ltd. Automobile R&d Center
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Takaya Yasuhiro
Department Of Mechanical Engineering And Systems Osaka University
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Takaya Yasuhiro
Department Of Mechanical Engineering And Systems Graduate School Of Engineering Osaka University
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Eom Sang
Department Of Mechanical Engineering And Systems Osaka University
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