D31 Evaluation of Unstable Behavior in Micro-probe Trapped by Optical Radiation Pressure(Nano/micro measurement and intelligent instruments)
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概要
- 論文の詳細を見る
Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to "shadow effect" that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.
- 2009-12-01
著者
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Takaya Yasuhiro
Department Of Mechanical Engineering And Systems Graduate School Of Engineering Osaka University
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Hayashi Terutake
Department Of Mechanical Engineering Osaka University
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Hayashi Terutake
Department Of Mechanical Engineering And Systems Graduate School Of Engineering Osaka University
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Kobayashi Mitsutoshi
Department Of Mechanical Engineering Osaka University
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